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제목 Effect of interface layer on growth behavior of atomic layer deposited Ir thin film as novel Cu diff
작성자 idtc
작성일자 2014-08-19
조회수 136
- Effect of interface layer on growth behavior of atomic layer deposited Ir thin film as novel Cu diffusion barrier, APPLIED SURFACE SCIENCE, 257, pp9654~9660, (2011)
첨부파일
SCI_29_Effect_of_interface_layer_on_growth_behavior_of_atomic-layer-deposited_Ir_thin_film_as_novel_Cu_diffusion_barrier.pdf