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Post annealing effect on ultra thin Hf-based high-k gate oxide on Si
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2014-08-19
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- Post annealing effect on ultra thin Hf-based high-k gate oxide on Si,
CURRENT APPLIED PHYSICS
, 9, pp104~107, (2009)
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SCI_16-Current_Applied_Physics_2009_SCIE_IF_1.526.pdf