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Á¦¸ñ Post annealing effect on ultra thin Hf-based high-k gate oxide on Si
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ÀÛ¼ºÀÏÀÚ 2014-08-19
Á¶È¸¼ö 136
- Post annealing effect on ultra thin Hf-based high-k gate oxide on Si, CURRENT APPLIED PHYSICS, 9, pp104~107, (2009)
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SCI_16-Current_Applied_Physics_2009_SCIE_IF_1.526.pdf