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제목 Annealing effect on physical and electrical characterization of thin HfO2, HfSixOy and HfOyNz films
작성자 idtc
작성일자 2014-08-19
조회수 132
- Annealing effect on physical and electrical characterization of thin HfO2, HfSixOy and HfOyNz films on Si, MICROELECTRONIC ENGINEERING, 86, pp357~360, (2009).
첨부파일
SCI_14-Microelectronic_Eng2009_SCI_IF1.583.pdf