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Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor
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2014-08-19
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- Physical and electrical characterization of high-k ZrO2 metal–insulator–metal capacitor,
Thin Solid Films
, Vol. 516, pp. 8333-8336 (2008)
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SCI_11-TSF-high-k-2008_SCI_IF1.936.pdf