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Deposition temperature effect on electrical properties and interface of high-k ZrO2 capacitor
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- Deposition temperature effect on electrical properties and interface of high-k ZrO2 capacitor, J. Phus. D:
Appl. Phys.
, 41, (2008)
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SCI_10-JPD_41_172005_2008_SCI_IF2.2.pdf