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Wet and dry etching of La0.67(Sr,Ca)0.33MnO3 films on Si
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2014-08-19
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104
- Wet and dry etching of La0.67(Sr,Ca)0.33MnO3 films on Si,
Thin Solid Films
, 515, pp. 587-590 (2006)
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SCI_6-TSF-Etching2006-SCI.pdf